# tender for a batch spray tool

- **Source:** TED · `566153-2025`
- **Buyer:** Danmarks Tekniske Universitet - DTU
- **Published:** 2025-08-29
- **Deadline:** —
- **Estimated value:** 1,100,000 EUR
- **CPV codes:** 38000000
- **Place-of-performance NUTS:** DK012, DNK
- **Buyer-address NUTS:** —
- **Notice type:** can-standard / 29

## Procedure details

Source lists may span several lots; list positions do not establish relationships.

### Procedure Types

- open

### Award Criterion Names

- Price
- Quality

### Award Criterion Descriptions

- See instructions to tenderers

### Options

- Options under the Agreement can be purchased as add-ons/activated by DTU within one year after Delivery (completed SAT). The agreement includes two separate options, see appendix 1.1.

## Description

DTU Nanolab requires one spray tool equipped with ozone, HF, HCl and NH4OH for wafer cleaning purposes. The tool is to be able to handle batch processing (up to 25 wafers per run). The tool will be used in our ISO 14644-1 Class 4 and 5 clean room. The tool will be used by many different users with diverse backgrounds, which means that operator safety is an important aspect. Another important aspect is the ease of use with special attention on software operation and setup change for different wafer sizes. Please see Appendix 1 Requirement specification for further information.

## Award result

- **Published notice total:** 978,890 EUR
- **Contract concluded:** 2025-08-27
- **Winner:** Siconnex Customized Solutions GmbH (CVR ATU54968904) · value 978,890 EUR
Published values may cover multiple lots, options and frameworks; they are not supplier revenue. Unlinked notice summaries do not assign each value or expiry to each winner.

## Original notice

https://ted.europa.eu/da/notice/-/detail/566153-2025