# Silicon deep reactive ion etcher (Si DRIE)

- **Source:** TED · `816464-2025`
- **Buyer:** Danmarks Tekniske Universitet - DTU
- **Published:** 2025-12-09
- **Deadline:** —
- **Estimated value:** 989,000 EUR
- **CPV codes:** 38000000, 51430000
- **NUTS codes:** DK012, DNK
- **Notice type:** can-standard / 29

## Description

DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients.

## Award result

- **Total awarded:** 989,000 EUR
- **Contract concluded:** 2025-12-01
- **Winner:** Samco Inc (CVR 4130001014511) · value 989,000 EUR · 3 bids received

## Original notice

https://ted.europa.eu/da/notice/-/detail/816464-2025