Imaging Spectroscopic Nulling Ellipsometer

DTU intends to order an imaging spectroscopic nulling ellipsometer for anisotropic refractive index measurements on materials with sample sizes down to few micrometers. The equipment should have the ability to: • Measure the uniaxial anisotropic complex refractive index of samples with thickness of around 100 nm, and determine both the refractive index and thickness with high accuracy • Provide spatial resolution down to 1 micrometer (at a wavelength of 400 nm) for measuring few-micron-sized samples, such as exfoliated 2D materials. • Provide variable angle imaging spectroscopic ellipsometry (from 38° to 90°, where 90° means transmis-sion mode). • Measure over a spectral range covering 190 nm – 1000 nm (UV-Vis), with the capability of being upgraded to extend into the near infrared (up to 1700 nm). • Measure samples on transparent substrates • Automate measurements over cm-scale areas (such as standard 4-inch wafers) • Be upgraded to Mueller Matrix measurements (for measuring biaxial samples). • Provide software for ellipsometric modelling.