Opgradering af eksisterende anlæg hos DTU Nanolab

The machine: Analytical characterization by a cylindrical mirror analyzer (CMA) of Auger electrons and low energy electron diffraction (LEED) including depth profile capability (Ion Gun). The system is placed in an ultra-high-vacuum chamber directly connected to the main chamber where metal oxide thin films are de-posited by molecular beam epitaxy. The system will enable the detection of atomic concentration of con-tributing species and the crystal structure.